Advanced Energy's atmospheric source technologies provide sophisticated yet streamlined designs for your advanced processes. The result is seamless integration, exceptional reliability, and a high level of functionality that enables you to advance your manufacturing and abatement processes to the next level.
Remote Plasma Sources (RPS)
Integrated power supply/plasma sources that generate a high-density plasma for the remote delivery of activated species
Foreline PFC Abatement
Remote plasma sources for foreline PFC abatement