SOURCE TECHNOLOGY

Photo of Litmas RPS 1501 and 3001 remote plasma source platform Advanced Energy's atmospheric source technologies provide sophisticated yet streamlined designs for your advanced processes. The result is seamless integration, exceptional reliability, and a high level of functionality that enables you to advance your manufacturing and abatement processes to the next level.

Remote Plasma Sources (RPS)
Integrated power supply/plasma sources that generate a high-density plasma for the remote delivery of activated species

Foreline PFC Abatement
Remote plasma sources for foreline PFC abatement