Advanced Energy's accelerated ion beam sources, inductively-coupled plasma sources, and atmospheric source technologies provide sophisticated yet streamlined designs for your advanced processes. The result is seamless integration, exceptional reliability, and a high level of functionality that enables you to advance your manufacturing and abatement processes to the next level.

Ion Sources
Multi-cell, single-cell, and linear ion source models

Remote Plasma Sources (RPS)
Integrated power supply/plasma sources that generate a high-density plasma for the remote delivery of activated species

Foreline PFC Abatement
Remote plasma sources for foreline PFC abatement