Advanced Energy
Advanced Energy
A global leader in innovative power and control technologies that drive high-growth, plasma thin-film and nontech manufacturing processes.
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POWER SYSTEMS
Advanced Energy is a leading global provider of power products used in fabrication processes for semiconductor, flat panel display, data storage products, solar cells, architectural glass, and other advanced product applications.
 
If you are sputtering, please review our power supply selection matrix:
 

Power supply selection matrix

I have a specific target material. How do I determine which type of process power supply to use: an RF power supply or an AC or DC supply? Visit our FAQ page for details.

 Our power products deliver:

  • Unrivaled power plasma control
  • Unmatched DC and RF arc handling
  • Cutting-edge match technology
  • Leading, integrated, and field-proven power-delivery solutions
We've designed our power system capabilities for:
  • RF cleaning 
  • Metal and dielectric etching 
  • Photoresist ashing 
  • Chemical vapor deposition (CVD) 
  • Plasma-enhanced chemical vapor deposition (PECVD) 
  • Physical vapor deposition (PVD) 
  • Sputter deposition
In addition, we supply DC sputtering (reactive and metallic), AC dual-cathode sputtering, and PECVD and units for ion beam deposition, reactive ion beam etch (RIBE), and leading-edge plasma instrumentation applications.


Literature Downloads

The Art of Choosing the Right Power Supply (2008) white paper
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