The Advanced Energy
® (AE) Pinnacle
® Plus+ power supply provides all of the advantages of a pulsed-DC solution for your reactive processes—in a one-box package that delivers additional benefits in the form of ease of use, cost savings, and superior flexibility. Combining standard DC technology and process-proven pulsed-DC technology patented by AE in the 1990s, the Pinnacle Plus+ power supply provides higher deposition rates, more repeatable performance, and exceptional film quality compared to complicated and expensive AC-power solutions. The Pinnacle Plus+ product line consists of single-output 5 kW and 10 kW models, as well as a dual output 5 kW model.
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Benefits |
Features |
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Higher deposition and yield rates
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Superior film uniformity and quality
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Reduced substrate damage caused by arcing
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Lower cost
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Easy system integration
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Excellent process flexibility and latitude
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Repeatable performance
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Stable operation high on the transition curve
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Higher throughput
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Convenient monitoring and control
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Unmatched system flexibility
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One compact package
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Adjustable frequency range of 5 to 350 kHz
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Variable duty cycle up to 45%
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Wide voltage range—single-tap wide impedance range
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High-power operation
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Low substrate heating
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Superior arc control
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Dual output for multi-chamber production
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