PATENT MARKING

Patent No. Issued Patents Products
5,187,580 High Power Switch-Mode Radio Frequency Amplifier Method and Apparatus RFG, Apex®, Litmas, Paramount®
5,427,669 Thin Film DC Plasma Processing System Sparc, Sparc-LE, Sparc-LE V, Starburst, Pulsar, Pinnacle Plus
5,523,955 System for Characterizing AC Properties of a Processing Plasma Z’Scan, Navigator® (selected versions)
5,535,906 Multi-Phase DC Plasma Processing System Pinnacle®
5,576,939 Enhanced Thin Film DC Plasma Power Supply Sparc, Sparc-LE, Sparc-LE V, Starburst, Pulsar, Pinnacle® Plus
5,654,679 Apparatus for Matching a Variable Load Impedance with an RF Power Generator Impedance FTMS
5,718,813 Enhanced Reactive DC Sputtering System Sparc, Sparc-LE, Sparc-LE V, Starburst, Pulsar, Pinnacle Plus
5,747,935 Method and Apparatus for Stabilizing Switch-Mode Powered RF Plasma Processing RFG, Apex®
5,897,753 Continuous Deposition of Insulating Material Using Multiple Anodes Alternated between Positive and Negative Voltages RAS
6,024,844 Enhanced Reactive DC Sputtering Sparc, Sparc-LE, Sparc-LE V, Starburst, Pulsar, Pinnacle® Plus
6,046,546 Stabilizer for Switch-Mode Powered RF Plasma RFG, Apex®, Paramount®
6,046,594 Method and Apparatus for Monitoring Parameters of an RF Powered Load in the Presence of Harmonics Lynx, Z-Scan
6,156,667 Methods and Apparatus for Plasma Processing Litmas®
6,183,605 AC Powered System for Continuous Deposition of a Cathode Material RAS
6,217,717 Periodically Clearing Thin Film Plasma Processing System Sparc, Sparc-LE, Sparc-LE V, Starburst, Pulsar, Pinnacle ®Plus
6,229,392 High Power Switch-Mode Radio Frequency Amplifier Method and Apparatus RFG, Apex, Litmas®
6,291,938 Methods and Apparatus for Igniting and Sustaining Inductively Coupled Plasma Litmas®
6,326,584 Methods and Apparatus for RF Power Delivery Litmas®
6,368,477 Adjustable Energy Quantum Thin Film Plasma Processing System Pinnacle®, Summit®, Ascent®
6,384,540 System for High Power RF Plasma Processing Apex®
6,392,210 Methods and Apparatus for RF Power Process Operations with Automatic Input Power Control Litmas®
6,424,232 Method and Apparatus for Matching a Variable Load Impedance with an RF Power Generator Impedance FTMS, Paramount®
6,521,099 Periodically Clearing Thin Film Plasma Processing System Sparc, Sparc-LE, Sparc-LE V, Starburst, Pulsar, Pinnacle® Plus
6,617,679 Semiconductor Package for Multiple High Power Transistors Stealth FET, Apex®, Paramount®
6,661,324 Voltage and Current Sensor Navigator®, (selected versions),  Z-Scan
6,697,265 Wide Range DC Power Supply Utilizing Voltage Doubling Output Capacitors and Inductive Choke to Extend Full Power Load Impedance Range Pinnacle® (selected versions), Diamond, X-Arc
6,724,148 Mechanism for Minimizing Ion Bombardment Energy in a Plasma Chamber Xstream
6,791,274 An Improved RF Power Control Device for RF Plasma Applications Ovation
6,802,366 Swage Method for Cooling Pipes Xstream, Litmas, Rapid-OE
6,812,648 Method of Cleaning Ion Source, and Corresponding Apparatus/System Linear Ion Sources
6,819,096 Power Measurement Mechanism for a Transformer Coupled Plasma Source Xstream
6,822,396 Transformer Ignition Circuit for a Transformer Coupled Plasma Source Xstream
6,844,802 Parallel Core Electromagnetic Device Diamond
6,888,313 Impedance Matching Network with Termination of Secondary RF Frequencies Navigator®(selected versions)
6,927,358 Vacuum Seal Protection in a Dielectric Break Xstream
6,943,317 Apparatus and Method for Fast Arc Extinction with Early Shunting of Arc Current in Plasma Summit®
6,946,063 Deterioration Resistant Chambers for Inductively Coupled Plasma Production Xstream
6,979,980 Soft Switching Interleaved Power Converter Summit®, Solaron®
7,005,845 Power Measurement Mechanism for a Transformer Coupled Plasma Source Xstream
7,049,751 Termination of Secondary Frequencies in RF Power Delivery Navigator® (selected versions)
7,081,598 DC-DC Converter with over-voltage protection circuit Summit®
7,105,075 DC Power Supply Utilizing Real Time Estimation of Dynamic Impedance Summit®
7,157,857 Stabilizing Plasma and Generator Interactions Apex®, Paramount®
7.245,084 Transformer Ignition Circuit for a Transformer Coupled Plasma Source Xstream
7,289,341 Power Supply Adaptive Feed Forward Control Circuit Pinnacle (selected versions)
7,305,311 Arc Detection and Handling in Radio Frequency Power Applications Apex®, Paramount®
7,423,894 Interleaved Soft Switching Bridge Power Converter Solaron® Ascent® and Summit®
7,445,695 Method and System for Conditioning a Vapor Deposition Target Ascent® and Summit®
7,468,494 Reaction Enhancing Gas Feed for Injecting Gas into a Plasma Chamber   Xstream
7,498,908 High Power PIN Diode Switch Navigator® (selected versions)
7,547,005 System and Method for Delivering Vapor Water Delivery System
7,619,200 Device, System and Method for Coupling Multiple Photovoltaic Arrays Solaron®
7,619,910 Interleaved Soft Switching Bridge Power Converter Solaron®
7,624,791 Cooling Apparatus for Electronics Ovation (selected versions)
7,761,247 Arc Detection and Handling in Radio Frequency Power Applications Apex®, Paramount®
7,768,751 System and Method for Ground Fault Detection and Interruption Solaron®
7,822,565 System, Method and Apparatus for Monitoring Characteristics of RF Power Paramount®, PDX II, Lynx, Navigator® (selected versions)
7,825,719 System and Method for Wideband Phase-Adjustable Common Excitation Paramount®
7,839,223 Method and Apparatus for Advanced Frequency Tuning Paramount® (selected versions)
8,044,594 Power Supply Ignition System and Method Crystal®
8,093,884 Directional Coupler Paramount®  VHF
8,111,531 Interleaved Soft Switching Bridge Power Converter Ascent® Summit® and  Solaron®
8,133,359 Methods and Apparatus for Sputtering Deposition Using Direct Current Ascent® DMS
8,134,812 Energy Conversion System with Fault Detection and Interruption 250NX, 333NX, 500NX formerly Solaron®
8,203,069 System, Method and Apparatus for Coupling Photovoltaic Arrays Solaron®
8,217,299 Arc Recovery Without Overvoltage for Plasma Chamber Power Supplies using a Shunt Switch Ascent®
8,258,874 Dual Mode Control of a Power Generator Paramount®
8,294,296 System, Method, and Apparatus for Remotely Coupling Photovoltaic Arrays 250NX, 333NX, 500NX
8,319,436 Passive Power Distribution for Multiple Electrode Inductive Plasma Source Navigator® (selected versions)
8,390,977 Solar Power Inverters, Including Solar Power Inverters Having Transient Voltage Surge Suppression Devices and Associated Systems and Methods 100TX, 260TX, 250TX, and 500TX
8,395,078 Arc Recovery with Over Voltage Protection for Plasma Chamber Power Supplies Ascent® (selected versions)
8,344,547 System And Method Of Determining Maximum Power Point Tracking For A Solar Power Inverter 100TX, 260TX, 250TX, and 500TX
8,416,008 Impedance Matching Network Using BJT Switches in Variable-Reactance Circuits Navigator® (selected versions)
8,552,665 Proactive Arc Management of a Plasma Load Ascent®
8,676,398 Temperature-Controlled Solar Power Inverters 100TX, 260TX, 250TX, and 500TX
8,716,984 Method and Apparatus for Modifying the Sensitivity of an Electrical Generator to a Nonlinear Load Paramount® (selected versions)
8,742,669 Passive Power Distribution for Multiple Electrode Inductive Plasma Source Navigator® (selected versions)
8,742,939 Aspirating Particle Sensor for Smoke Detection within an Electronics Enclosure Paramount® (selected versions)
8,815,329 Delivered Energy Compensation During Plasma Processing Ascent®  (selected versions)
8,884,180 Over Voltage Protection during Arc-Recovery for Plasma Chamber Power Supplies Ascent® (selected versions)
9,224,579 Adjustable Non Dissipative Voltage Boosting Snubber Network for Achieving Large Boost Voltages Ascent® (selected versions)
9,225,299 Variable Class Amplifier System and Method Paramount® (selected versions)
9,294,100 Frequency Tuning System and Method for Finding Global Optimum Paramount® (selected versions)
9,313,870 Arc Management with Voltage Reversal and Improved Recovery Ascent® (selected versions)