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LOW- / MID-FREQUENCY POWER SYSTEMS
Photo of PEII Series low/mid-frequency power system
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PEII Low-Frequency Series

The low-frequency PEII series provides 40 kHz pulse width modulation (PWM) power supplies featuring enhanced arc control and internal load matching with outputs of up to 60 kW—with no external combining hardware such as transformers.
Benefits Features
  • Regulation on power, voltage, or current 
  • Maximum flexibility and modularity 
  • Enhanced arc control 
  • Automatic process safeguard 
  • Wide tap range 
  • High power density
  • 5 kW and 10 kW options (master/slave up to 60 kW)
  • Internal load match (10:1 Impedance range)
  • Two distinct arc-handling circuits
  • Efficient, compact, water-cooled design
  • Multiple optional accessories
  • CE compliant

Literature Downloads

PEII Low-Frequency Power Supplies: 5 kW to 60 kW brochure
Enhanced Plasma Containment for Inline Sputtering Systems (2008) application note
Signal Integrity for Vacuum Processing Systems (2003) white paper
Power Systems for Reactive Sputtering of Insulating Films (2001) white paper
Introducing Power Supplies and Plasma Systems (2001) white paper
Optical Emission Studies for the Characterization of Pulsed Magnetron Sputtering Systems, April 2002 magazine reprint
Fabs can ride through voltage sags with power-quality targets, July 2004 magazine reprint
Power Supplies Advance Beyond Volts and Amps, June 2003 magazine reprint
AE Global Services data sheet

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