The versatile Navigator^® matching network's advanced technology provides rapid, accurate, and reliable matching across a wide range of load impedances—15 W to 30 kW. Equipped with microprocessor-controlled stepper motor circuitry and digital, user-selectable tuning algorithms, it provides greater consistency and accuracy than traditional analog-based tuning methods. This enables it to optimize delivered process power to semiconductor, solar, FPD, and MEMs manufacturing processes, including etch, CVD, HDP-CVD, PVD, and chamber clean applications. An optional internal Z’Scan^® RF sensor provides real-time measurement and analysis of process power and impedence, enabling you to identify and significantly reduce process variability. In addition, optional Virtual Front Panel (VFP) software enables you to monitor and command the matching network through a personal computer.