Renowned for industry-leading accuracy, speed, and reliability, Aera® flow products enhance cost efficiency, productivity, and quality in thin-film manufacturing processes. Premier Aera technology continually sets new performance standards. With over 30 years at the forefront of the flow control industry, Aera products are widely installed across the globe.
Product Line
This comprehensive product line features MFC, MFM, vapor-delivery, and pressure-control solutions that increase the stability and repeatability of any thin-film process, including CMP, CVD, PVD, diffusion, etch, and more. MFC offerings range from the advanced, pressure-insensitive PI-980® MFC to high-economy analog models.
Our featured products include:
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