Industry-leading arc management performance for high film quality and stable power delivery through extreme arc conditions—With the benefit of AE’s arc management technology leadership, Ascent® AMS power supplies deliver stable, repeatable power, in the most extreme arcing conditions, regardless of process material or cathode design.
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Benefits |
Features |
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High film quality and throughput
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Reduced film, substrate, and equipment damange
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Stable throughput and power delivery under extreme arcing conditions
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Easy integration and control
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Arc Management System™ (AMS) technology
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Set Point Compensation™ technology
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Arc Sync® technology—master/slave up to 12 units
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Ethernet, DeviceNet®, Profibus, RS-232/485, and analog communications
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Virtual Front Panel (VFP) software, remote front panel, and passive front panel interfaces
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RoHS, CE, NRTL, SEMI S2, and SEMI F47 compliance
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