Digitally controlled RF power supplies from 400 kHz to 60 MHz, and power from 1.5 to 8 kW, with frequency tuning, pulsing, and pulse synchronization—With full digital control and near-instantaneous response to plasma changes, the Paramount
® platform keeps you at the leading edge of process innovation.
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Benefits |
Feature |
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Remarkable plasma stability and process repeatability
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Precise RF control
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Near-instantaneous response
(< 100 ms) to plasma changes
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Flexibility and adaptability to advancing manufacturing technologies
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Full digital control
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Pulsing and pulse synchronization
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Frequency tuning
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Real-time power and impedance measurement
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Tightly regulated output power
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Wide operating frequency range (400 kHz to 60 MHz)
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Wide output power range (5 to 8000 W)
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High VSWR capability
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Arc management
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Phase synchronization (CEX)
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