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AE® also showcasing Aera®AS-92 Thermal Vaporizer System and Aera® EPV Exhaust Pressure Controller
HACHIOJI, Japan, Nov. 27, 2007—
Advanced Energy Industries, Inc.
Industries, Inc. (NasdaqGM: AEIS) will highlight the new Paramount™
RF power-delivery system during SEMICON®
Japan 2007. AE®
will also feature its Aera®
AS-92 thermal vaporizer system and Aera EPV100-AW exhaust pressure controller, as well as other systems from its advanced product portfolio at the exposition, to be held December 5-7 at the Makuhari Messe in Chiba, Tokyo, Japan.
AE’s new Paramount RF power system enables faster transitions, shorter steps and reduced process times to achieve unprecedented control, accuracy and repeatability in ever more complex applications. Precise power delivery and optional RF pulsing allow more accurate process control and uniformity when etching and depositing anti-reflective coatings, hard masks, cap layers and etch-stop layers required by the next-generation nodes. The Paramount system’s measurement technology and optional ultra-fast frequency tuning enable it to deliver exceptionally precise power at 13.56 MHz fixed or variable frequencies.
Also showcased will be the Aera EPV-100AW exhaust pressure controller. It has a patented technology that enables user selection of either “absolute” or “differential” control of a fab’s exhaust pressure. The EPV controller enables precise control of exhaust pressure and, thereby, of oxide film thickness—regardless of atmospheric pressure changes, such as weather conditions, house exhaust-pressure fluctuations or altitude. The EPV controller’s superior durability, reliability and reduced power consumption enable improved yield and lower cost of ownership.
The Aera AS-92 thermal vaporizer system features industry-leading reliability and flow stability, which result in measurably improved film uniformity as well as increased yield system uptime. The AS-92 enables consistent delivery of vaporized TEOS, SiCl4, HMDS and other precursor materials on a reliable basis, without the need for constantly-monitored refill pressures. The integrated thermal technology prevents condensation, while a high-temperature MFC controls the vapor delivery with accuracy. Gas-wetted surfaces are electropolished and ultra-clean.
AE will also feature its Pulsar high-power DC pulsing accessory, which provides improved process quality and uniformity, as well as increased throughput and yield. With available 40 kW, 40/40 kW, and 80 kW pulsing functions, the Pulsar accessory goes beyond arc handling, actually preventing arcs from occurring. As a result, the Pulsar accessory reduces contamination, splattering and crazing in such varied applications as residential and architectural glass coating, flat panel display manufacturing, roll-to-roll coating and headlight metallizing.
Solar PV Applications
AE will also display several of its products for solar PV applications, including the Cesar® RF generator, a full-featured generator that meets the critical specifications of the solar-cell manufacturing industry.
To learn more about AE’s products during SEMICON Japan, visit www.advanced-energy.co.jp/SCJ07.html.
About Advanced Energy
Advanced Energy is a global leader in innovative power and control technologies for high-growth, thin-film manufacturing and solar power generation. Specifically, AE targets semiconductors, solar cells, flat panel displays, data storage products, architectural glass, solar grid-tie inverters and other advanced applications.
AE’s product portfolio includes precise, flexible power systems; reliable gas and liquid flow-management systems; accurate thermal instruments; and global support services. Leveraging this focused product portfolio and technology leadership, AE creates solutions aimed at maximizing process impact, improving productivity and lowering cost of ownership for its customers, including original equipment manufacturers (OEMs) and end users around the world.
AE operates in regional centers in North America, Asia and Europe and offers global sales and support through direct offices, representatives and distributors. Founded in 1981, AE is a publicly held company traded on Nasdaq Global Market under the symbol AEIS. For more information, go to www.advanced-energy.com.
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Advanced Energy®, AE®, Aera®, Cesar® and Paramount™ are trademarks of Advanced Energy Industries, Inc.
SEMICON® is a registered trademark of Semiconductor Equipment and Materials International (SEMI).