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FORT COLLINS, Colo., May 16, 2006
Advanced Energy Industries, Inc.
—Advanced Energy Industries, Inc. (Nasdaq: AEIS) today announced it has secured a design win for its Sekidenko temperature and emissivity instrumentation from a leading provider of chemical vapor deposition (CVD) equipment for semiconductor manufacturing. The Sekidenko instruments provide advanced, multi-channel temperature measurement for use in sub-90-nm low-k dielectric film and high-stress silicon nitride cures. The innovative, integrated solution benefits the customer by providing enhanced wafer-to-wafer uniformity and improved overall process yield. This design win highlights AE’s strong ability to develop application-specific solutions that address important technology issues affecting the success of its customers.
AE’s thermal instrumentation technology offers in-situ, non-contact optical fiber thermometer (OFT) capability with real-time emissivity compensation. For sub-90-nm applications, AE’s Sekidenko instrumentation delivers the high stability, exceptional repeatability and precision required for advanced, volume-production environments.
“This design win demonstrates AE’s talent for addressing our customers’ process concerns with innovative technology,” noted Dr. Hans Betz, AE president and CEO. “Applying our broad application expertise in thermal instrumentation, we worked in partnership with this customer to build an application-specific temperature and emissivity solution that optimizes their process. As we grow our position in this core semiconductor market, we continue to proactively listen to our customers to help them gain competitive advantages with our solutions.”
Sekidenko Optical Fiber Thermometers (OFTs)AE’s Sekidenko optical fiber thermometers (OFT) with real-time emissivity compensation are in-situ, non-contact instruments that enable customers to improve within-wafer and wafer-to-wafer temperature uniformity. Further, AE’s custom, thermal-instrumentation application consulting includes heat-transfer design analysis, extensive material evaluation and custom interface solutions.