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FORT COLLINS, Colo., July 5, 2005
Advanced Energy Industries, Inc.
—Advanced Energy Industries, Inc. (Nasdaq: AEISE) today unveiled its next-generation Aera® PI-980™ series of pressure-insensitive mass flow controllers (MFCs) for advanced semiconductor applications. Designed to improve processes for etch, CVD, PVD and diffusion, the PI-980 MFC’s innovative technology provides greater gas-flow stability, higher accuracy, exceptionally fast response and superior real-time process control. Its highly stable flow delivers greater process control and repeatability, maximizing production yields.