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High-power systems build on proven Litmas technology to perform highly efficient PFC abatement in 200- and 300mm etch processes
Advanced Energy Industries, Inc.
To provide a full portfolio of hazardous gas scrubbing capabilities and ensure that customers have access to a single vendor with worldwide capabilities for the entire PFC abatement solution, AE is extending its relationship with CS CLEAN SYSTEMS AG. CS AG will bundle its gas-delivery system and tool-integration kit with AE's Litmas RPS 1501 plasma sources to create a complete package (sold under the CS CLEAN PCS brand) that chipmakers can employ to achieve world-class PFC abatement in their etch processes.
Dr. Karl Markert, vice president of sales and marketing with CS AG, noted, "We chose to work with AE because of the wide set of plasma conditions that AE's systems can address as well as AE's unparalleled technical know-how in the PFC abatement and semiconductor equipment area. Our companies' products are highly complimentary, and we believe that CS AG's ability to offer Litmas products as part of a wider emissions control portfolio will help speed interest in and adoption of this technology."
The new Litmas RPS 1501 and RPS 3001 plasma sources are slated to begin shipping in Q3 2004.
About Advanced Energy
Advanced Energy is a global leader in the development and support of technologies critical to high-technology manufacturing processes used in the production of semiconductors, flat panel displays, data storage products, compact discs, digital video discs, architectural glass and other advanced product applications.
Leveraging a diverse product portfolio and technology leadership, AE creates solutions that maximize process impact, improve productivity and lower cost of ownership for its customers. This portfolio includes a comprehensive line of technology solutions in power, flow and thermal management and plasma and ion beam sources for original equipment manufacturers (OEMs) and end-users around the world.
AE operates in regional centers in North America, Asia and Europe and offers global sales and support through direct offices, representatives and distributors. Founded in 1981, AE is a publicly held company traded on Nasdaq National Market under the symbol AEIS. More information can be found at www.advanced-energy.com.