For more information, contact:

Jim Donaldson Advanced Energy Industries, Inc. 970.407.6374

Marna Shillman Advanced Energy Industries, Inc. 970.407.6280 marna.shillman@aei.com

FORT COLLINS, Colo., Aug. 5, 2003—Advanced Energy Industries, Inc. (Nasdaq: AEIS) today announced that its Apex^® radio frequency (RF) integrated power delivery systems have been selected as the default standard on plasma-enhanced chemical vapor deposition (PECVD) systems by one of the world’s leading semiconductor equipment manufacturers. The designation was awarded to the Apex 3 kW, 13.56 MHz power system with integral matching network. These compact, single-box systems deliver matched power to the chamber over a very wide impedance range, enabling the customer to cost-effectively run a broad array of deposition processes with one efficient, chamber-mounted power system. A long-time customer of AE, the equipment maker will use the Apex power systems on a number of its key PECVD processes.

“We have a strong history of helping our customers solve critical power delivery problems, and when this valued customer needed greater PECVD process flexibility, our cost-effective and process-efficient Apex power systems fully satisfied their process requirements,” said Advanced Energy Chairman and CEO Doug Schatz. “This significant designation further verifies our long-held position as the global leader in innovative power solutions.”

Apex RF Power Delivery Systems
Apex Power Delivery Systems provide high power density, highly accurate power delivery and increased reliability over other RF generator/match configurations currently available. Apex Delivery Systems use a built-in, configurable, fixed-match network, which enables users to reduce overall parts count and to locate their power source close to the process chamber.

About Advanced Energy
Advanced Energy is a global leader in the development and support of critical technologies for high-technology manufacturing processes used in the production of semiconductors, flat panel displays, data storage products, compact discs, digital video discs, architectural glass, and other advanced product applications.

Leveraging a diverse product portfolio and technology leadership, AE creates solutions that maximize process impact, improve productivity and lower cost of ownership for its customers. This portfolio includes a comprehensive line of technology solutions in power, flow and thermal management, plasma and ion beam sources, and integrated process monitoring and control for original equipment manufacturers (OEMs) and end-users around the world.

AE operates in regional centers in North America, Asia and Europe, and offers global sales and support through direct offices, representatives and distributors. Founded in 1981, AE is a publicly held company traded on Nasdaq National Market under the symbol AEIS. For more information, please visit our corporate Website: www.advanced-energy.com