For more information, contact:

Jim Donaldson Advanced Energy Industries, Inc 970.407.6374

Dori Jones MCA 650.968.8900

SAN FRANCISCO, Calif., July 21, 2002—Advanced Energy Industries Inc. (Nasdaq: AEIS) is featuring its PrimAera digital mass flow controller (MFC) during SEMICON West, July 22-24, at San Francisco’s Moscone Center. Advanced Energy (AE) added the PrimAera MFC to its product offerings through its acquisition of Aera Japan Ltd. in January 2002.

The PrimAera digital MFC utilizes a small-diameter sensor that is highly sensitive to changing gas conditions. The core of the PrimAera MFC’s electronics is a digital signal processor operating at 30 MHz that replaces conventional sensing and control circuits with a digital algorithm, thus improving performance by eliminating the drift and inaccuracies inherent with analog instrumentation. Its piezoelectric diaphragm-seated control valve provides exceptionally fast response (<1 second response time), accuracy and reliability. Additionally, the PrimAera MFC offers unlimited gas selection without recalibration, which is accomplished by storing multiple surrogate gas calibration templates in memory, enabling users to significantly reduce their inventory of spare MFCs. This year, the PrimAera MFC is being featured in Booth #1910, under the Aera banner.

Also showcased this year in AE’s Booth #2202, will be its lines of critical subsystems used in plasma-based processes n the manufacture of semiconductor devices: RF and DC power supplies; temperature measurement and temperature control; ion-beam and plasma sources; and data management and connectivity solutions. In addition, for the first time, AE and Pacific Scientific Instruments (PSI) will have reciprocal demos in each other’s booths. In AE’s booth, PSI will be demonstrating how its HYT sensors act as true plug-and-play components that easily integrate into AE’s Symphony open-architecture connectivity system, while PSI is hosting a similar demonstration of the two companies’ technologies in its Booth #6161.

AE executives will be on hand in the company’s Booth #2202 to discuss its global acquisition and infrastructure strategy. The company’s most recent acquisitions include RF power supplier Dressler GmbH in March, the connectivity technology and related assets of Symphony Systems in April, and the completion of obtaining 100 percent ownership of source technology supplier Litmas in March.

Further expanding the company’s global infrastructure and presence in key regions where its end-user customers are located, AE recently established three new Class 1000 cleanrooms, in China, Taiwan and Singapore to provide more comprehensive support of AE’s MFC customers throughout Asia. This significant investment doubles the number of AE personnel in China and increases by 24 percent the company’s headcount in Taiwan, enabling AE to provide more rapid response to these customers’ service needs.

Copies of AE’s product brochures are available on its Web site at www.advanced-energy.com or by sending a request via e-mail to sales.support@aei.com.

About Advanced Energy
Advanced Energy is a global leader in the development, marketing and support of components and sub-systems critical to plasma-based manufacturing processes used in the production of semiconductors, flat panel displays, data storage products, compact discs, digital video discs, architectural glass, and other applications that require precise thin-film processes. AE offers a comprehensive line of technology solutions in power, flow and thermal management, plasma and ion beam sources, and integrated process monitoring and control to original equipment manufacturers (OEMs) and end-users around the world.

AE operates in regional centers in North America, Asia and Europe, and offers global sales and support through direct offices, representatives and distributors. Founded in 1981, AE is a publicly held company traded on Nasdaq National Market under the symbol AEIS. For more information, please visit our corporate Web site: www.advanced-energy.com