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This white paper discusses the next generation of ion-beam sources which feature low maintenance, high yield functions—with process performance, quality, and cost of ownership benefits. These robust sources are suitable for a broad range of industrial applications because of their ability to operate without external electron emitters. Thus, they can work in reactive gas environments, particularly oxygen.

Copies of this paper are available at no charge by sending a request via e-mail to sales.support@aei.com or from the web at advanced-energy.com.

Advanced Energy Industries, Inc. is a leading developer and manufacturer of power supplies and related products that are critical in the manufacturing of semiconductors, data storage devices, flat panel displays, and other industrial products using thin-film technology such as glass coatings, decorative coatings, and optical coatings. Founded in 1981, AE is a publicly held company traded on Nasdaq, symbol AEIS. Its web site address is advanced-energy.com.