For more information, contact:
Jim Donaldson
Advanced Energy Industries, Inc.
970.407.6374 |
Marna Shillman
Advanced Energy Industries, Inc.
970.407.6280
marna.shillman@aei.com |
Fort Collins, Colorado (October 18, 1999) – The next generation of pulsed dc process power solutions, the Pinnacle Plus+ series, is now available from Advanced Energy Industries, Inc. (Nasdaq NM: AEIS) for critical reactive processes. A technologically advanced dc alternative to RF sputtering, it delivers high quality films with high output accuracy and process repeatability that is critical in reactive processes.
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Individually controllable dual-output pulsed dc power from a single unit
-Provides a cost-effective solution for multi-chamber production
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Increased process flexibility<
-Incorporates an extended frequency range of 5 kHz to 350 kHz
-Full power over a wide impedance range with high current at low voltage
-50% duty cycle—the highest available—enables bi-polar pulsed dc operation
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More repeatable process performance
-Integrated microprocessor
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Active front panel
-Provides easy access to critical parameters
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Meets CE requirements