For more information, contact:

Tom Grove Advanced Energy Industries, Inc. 970.407.6313

FORT COLLINS, Colorado (February 27, 1998)—Two brochures from Advanced Energy Industries, Inc. (AE) describe the PDX series of highly reliable, light-weight, compact, CE-certified, mid-frequency power supplies for plasma processes. The proven PDX series has an actual MTBF in excess of 1,000,000 hours in the field. These easy-to-integrate power supplies deliver precise power for such application as:

• Plasma-enhanced chemical vapor deposition (PECVD)
• Etching
• Dielectric sputtering
• Plasma polymer processes

The single-phase input PDX offers outputs of up to 1250 W with a frequency range of 325 to 450 kHz. The three-phase input PDX delivers up to 8000 W with a range of 235 to 460 kHz.

Features 

• Sinusoidal RF output with low harmonic distortion
• Operation over a wide frequency range
• Tight output power regulation based on user setpoints
• Internal loadmatching
• Virtually no stored energy at the output
• Arc suppression that reacts in less than 2 ms

For free copies of these brochures (AE 5600038 and 5601002), contact AE at the above address, phone number, or website.

Founded in 1981, AE is a leading supplier of power conversion and control systems for plasma-based thin film production equipment. Our systems are critical to industrial processes that use gaseous plasmas to deposit or etch thin film layers on materials or substrates such as glass, silicon, and metals during the manufacture of semiconductors, data storage media, flat panel displays, and a host of other products.