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FORT COLLINS, Colorado (November 4, 1997)
Advanced Energy Industries, Inc.
—Advanced Energy Industries, Inc. (AE) announces the 13.56 MHz RFX 600A series of power supplies delivering low-wattage industrial power with input power factor correction for such applications as RF sputtering, plasma etching/deposition, and RF biasing, where repeatability and accurate power control are required. Delivering up to 600 W of reliable power, the cost-effective RFX 600A series has proven useful in such diverse environments as laboratory development and flat panel coating production. All RFX 600A models meet CE standards for safety, immunity, and emissions.