The Advanced Energy® OR400T Optical Fiber Thermometer (OFT) extends the flexibility of the OFT product family with a cost-competitive, non-contact solution for several high-volume semiconductor applications, including PECVD, LPCVD, PVD, and metal etch. Because of its compact design, the OR400T can be easily integrated to meet the unique requirements of many process applications.
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Benefits |
Features |
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Improves temperature-measurement accuracy
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Enhances wafer-to-wafer uniformity
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Provides a cost-competitive alternative to thermocouple-based measurements
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Increases productivity, yield, and throughput
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Compact, single-channel design
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In-situ, non-contact temperature measurement
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Support of RS-232 and analog data interfaces at up to 20 temperature readings per second
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Improved low-temperature performance
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