Sekidenko OR400T Optical Fiber Thermometers
The Advanced Energy® OR400T Optical Fiber Thermometer (OFT) extends the flexibility of the OFT product family with a cost-competitive, non-contact solution for several high-volume semiconductor applications, including PECVD, LPCVD, PVD, and metal etch. Because of its compact design, the OR400T can be easily integrated to meet the unique requirements of many process applications.
| Benefits |
Features |
- Improves temperature-measurement accuracy
- Enhances wafer-to-wafer uniformity
- Provides a cost-competitive alternative to thermocouple-based measurements
- Increases productivity, yield, and throughput
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- Compact, single-channel design
- In-situ, non-contact temperature measurement
- Support of RS-232 and analog data interfaces at up to 20 temperature readings per second
- Improved low-temperature performance
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