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SEKIDENKO THERMAL INSTRUMENTATION
Sekidenko multi-channel optical fiber thermometers (OFTs)  provide non-contact temperature measurement for RTP, HDP-CVD, MOCVD, UV cure, and other semiconductor processes.
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Sekidenko OR4000T, OR4000E, & OR400T Optical Fiber Thermometers & Emissometers

Sekidenko multi-channel OFTs build on the successful OR2000 product family, providing non-contact temperature measurement for RTP, HDPCVD, MOCVD, UV cure, and other semiconductor processes.

The OR4000T model supports read rates up to 2 kHz. The OR4000E adds real-time emissivity compensation to this feature. The OR400T provides a cost-effective alternative to thermocouple-based temperature measurements. 
 


Benefits Features
  • In-situ, non-contact temperature measurement
  • Immunity to RF and other sources of EMI
  • Enhanced wafer-to-wafer uniformity
  • Increased productivity, yield, and throughput
  • High stability and reliability
  • Industry-leading temperature and emissivity read rates
  • Real-time emissivity-compensated temperature measurements
  • Highly flexible, module-based platform architecture
  • Full I/O and control suite, including external trigger input and synchronization output
  • Enhanced low-temperature performance 


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