Advanced Energy® OR4000T and OR4000E multi-channel optical fiber thermometers (OFTs) provide industry-leading performance in non-contact temperature measurement for RTP, HDP-CVD, MOCVD, UV cure, and a variety of other semiconductor processes. The OR4000T model provides multi-channel capability and supports read rates up to 2 kHz for the most demanding semiconductor applications. The OR4000E model delivers high-speed performance like the OR4000T, with the added benefit of real-time emissivity compensation. Both models are modular in design and can be rapidly tailored to meet the unique requirements of each process application.
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Benefits |
Features |
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Improve temperature-measurement accuracy
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Enhance repeatability and minimize variation
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Increase productivity, yield, and throughput
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Increase stability and reliability across multiple chambers and substrate materials
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In-situ, non-contact temperature measurement
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Real-time emissivity measurement and compensation
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Industry-leading temperature and emissivity read rates
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Highly flexible, module-based platform architecture
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Full I/O and external trigger/synchronization suite
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