Sekidenko OR4000T and OR4000E Optical Fiber Thermometers & Emissometers
Photo of Sekidenko OR 4000T and OR4000E Optical Fiber Thermometers and Emissometers
   
Advanced Energy® OR4000T and OR4000E multi-channel optical fiber thermometers (OFTs) provide industry-leading performance in non-contact temperature measurement for RTP, HDP-CVD, MOCVD, UV cure, and a variety of other semiconductor processes. The OR4000T model provides multi-channel capability and supports read rates up to 2 kHz for the most demanding semiconductor applications. The OR4000E model delivers high-speed performance like the OR4000T, with the added benefit of real-time emissivity compensation. Both models are modular in design and can be rapidly tailored to meet the unique requirements of each process application.
 

Benefits Features
  • Improve temperature-measurement accuracy
  • Enhance repeatability and minimize variation
  • Increase productivity, yield, and throughput
  • Increase stability and reliability across multiple chambers and substrate materials
  • In-situ, non-contact temperature measurement
  • Real-time emissivity measurement and compensation
  • Industry-leading temperature and emissivity read rates
  • Highly flexible, module-based platform architecture
  • Full I/O and external trigger/synchronization suite