Advanced Energy® Sekidenko Multi-Channel Optical Fiber Thermometers & Emissometers

SEKIDENKO THERMAL INSTRUMENTATION

Sekidenko multi-channel optical fiber thermometers (OFTs) provide non-contact temperature measurement for RTP, HDP-CVD, MOCVD, UV cure, and other semiconductor processes.

Sekidenko OR4000T, OR4000E, & OR400T Optical Fiber Thermometers & Emissometers

Sekidenko multi-channel OFTs build on the successful OR2000 product family, providing non-contact temperature measurement for RTP, HDPCVD, MOCVD, UV cure, and other semiconductor processes.

The OR4000T model supports read rates up to 2 kHz. The OR4000E adds real-time emissivity compensation to this feature. The OR400T provides a cost-effective alternative to thermocouple-based temperature measurements.

Benefits	Features
In-situ, non-contact temperature measurement Immunity to RF and other sources of EMI Enhanced wafer-to-wafer uniformity Increased productivity, yield, and throughput High stability and reliability	Industry-leading temperature and emissivity read rates Real-time emissivity-compensated temperature measurements Highly flexible, module-based platform architecture Full I/O and control suite, including external trigger input and synchronization output Enhanced low-temperature performance