Advanced Energy Sekidenko OR4000T & OR4000E Optical Fiber Thermometers & Emissometers

SEKIDENKO THERMAL INSTRUMENTATION

Photo of Sekidenko OR 4000T and OR4000E Optical Fiber Thermometers and Emissometers

Sekidenko OR4000T and OR4000E Optical Fiber Thermometers & Emissometers

Advanced Energy^® OR4000T and OR4000E multi-channel optical fiber thermometers (OFTs) provide industry-leading performance in non-contact temperature measurement for RTP, HDP-CVD, MOCVD, UV cure, and a variety of other semiconductor processes. The OR4000T model provides multi-channel capability and supports read rates up to 2 kHz for the most demanding semiconductor applications. The OR4000E model delivers high-speed performance like the OR4000T, with the added benefit of real-time emissivity compensation. Both models are modular in design and can be rapidly tailored to meet the unique requirements of each process application.

Benefits	Features
Improve temperature-measurement accuracy Enhance repeatability and minimize variation Increase productivity, yield, and throughput Increase stability and reliability across multiple chambers and substrate materials	In-situ, non-contact temperature measurement Real-time emissivity measurement and compensation Industry-leading temperature and emissivity read rates Highly flexible, module-based platform architecture Full I/O and external trigger/synchronization suite