Sekidenko OR2000F Optical Fiber Thermometers
Sekidenko OR2000F Optical Fiber Thermometers (OFTs) offer thermal management and control solutions, and non-contact temperature measurement, for applications where time-temperature cycles affect productivity and yield. These
OFTs offer high-speed, high-temperature performance in
RTP,
HDPCVD, laser annealing, epitaxy,
MOCVD, as well as other applications. Advanced optics, extended temperature ranges, and one- to four-channel configurations ensure extreme accuracy and high sample rates.
| Benefits |
Features |
- In-situ, non-contact temperature measurement
- Extremely accurate wafer-to-wafer repeatability
- Improved uniformity
- High stability and reliability
- Increased productivity, yield, and throughput
|
- Sophisticated sensors made of sapphire or quartz
- Proprietary electronics, eliminating electromagnetic interference and reducing noise
- Extended-temperature, high-speed performance
- One to four configurable sensors (channels) enable modular configuration
- High sample rates (up to 600 readings per second) allow tracking of rapid temp changes
- Data-monitoring and data-logging options
|
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