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SEKIDENKO THERMAL INSTRUMENTATION 
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Sekidenko OR2000F Optical Fiber Thermometers

Sekidenko OR2000F Optical Fiber Thermometers (OFTs) offer thermal management and control solutions, and non-contact temperature measurement, for applications where time-temperature cycles affect productivity and yield. These OFTs offer high-speed, high-temperature performance in RTP, HDPCVD, laser annealing, epitaxy, MOCVD, as well as other applications. Advanced optics, extended temperature ranges, and one- to four-channel configurations ensure extreme accuracy and high sample rates.
Benefits Features
  • In-situ, non-contact temperature measurement
  • Extremely accurate wafer-to-wafer repeatability
  • Improved uniformity
  • High stability and reliability
  • Increased productivity, yield, and throughput
  • Sophisticated sensors made of sapphire or quartz 
  • Proprietary electronics, eliminating electromagnetic interference and reducing noise 
  • Extended-temperature, high-speed performance
  • One to four configurable sensors (channels) enable modular configuration 
  • High sample rates (up to 600 readings per second) allow tracking of rapid temp changes 
  • Data-monitoring and data-logging options


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