Photo of GenCal RF instrumentation
The GenCal system provides industry-leading measurement accuracy at the discrete frequencies commonly used in the plasma process industry, and the same state-of-the-art hybrid power sensor technology used by AE's R&D award-winning plasma impedance sensor. This optimized technology provides measurements in the presence of plasma-generated signals that have high harmonic content and noise with accuracy rates not currently available in other power measurement instruments.
Benefits Features
  • Quickly verifies proper operation of generator and tuner 
  • Provides alerts for power fluctuations in the generator
  • Selects set point for input to the power supply
  • Digital meter and parameter LEDs 
  • Display select switch 
  • Set point knob