The GenCal^™ system provides industry-leading measurement accuracy at the discrete frequencies commonly used in the plasma process industry, and the same state-of-the-art hybrid power sensor technology used by AE's R&D award-winning plasma impedance sensor. This optimized technology provides measurements in the presence of plasma-generated signals that have high harmonic content and noise with accuracy rates not currently available in other power measurement instruments.

 

Benefits	Features
Quickly verifies proper operation of generator and tuner  Provides alerts for power fluctuations in the generator Selects set point for input to the power supply	Digital meter and parameter LEDs  Display select switch  Set point knob