The FC-P2000 pressure-based MFC precisely controls low gas flow within a wide range of input pressures. This makes it highly effective in safe delivery system (SDS) applications, where source gas pressure decreases slowly as the gas is consumed.

The FC-P2000 MFC controls gas flows of 2 to 4 sccm (N₂ equivalent) down to a cylinder pressure of 5 Torr, thereby providing up to 95% usage of the gas in the cylinder.

Benefits	Features
High precision Cost effective Easy replacement for existing SDS MFCs Reduced clogging	Sonic nozzle technology