Ovation™ VHF Power-Delivery Systems
The Ovation
™ fully-integrated, power delivery system enables faster, higher-precision processes, such as those required for demanding narrow-linewidth, dielectric etch processes, through the implementation of a unique power delivery scheme. It is the first to accurately deliver power into a non-50-ohm environment without an external sensor, reacting faster than traditional power supplies. The 60-MHz design reduces voltage potential across the plasma sheath, minimizing ion etch damage, thus improving film quality and yields.
| Benefits |
Features |
- Broadens process windows
- Expands process capabilities
- Improves plasma characteristics
- Increases etch rate, selectivity, and uniformity
- Reduces Cost of Ownership
|
- 2760 W, 60 MHz (contact factory for higher power requirements)
- Sweep frequency
- Non-50 Ù measurement capability
- Analog, RS-232, and Ethernet control options
- Smaller footprint—half rack option for power up to 2.7 kW
- Highly stable and reliable
- Expert applications support
|
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