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LIQUID MASS FLOW CONTROLLERS
Aera® LX-1200 series liquid MFCs: precise, accurate, reliable liquid flow control that prevents bubble formation and retention problems. Ideal for liquids such as TEOS, TMP, and TMB.
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Aera® LX-1200 Series LMFCs

Aera® LX-1200 series liquid MFCs control the flow of a liquid rather than its heated vapor. A unique design prevents the bubble formation and retention problems that are common to competing LMFCs.
Aera® LX-1200 MFCs are ideal for liquids such as TEOS, TMP, and TMB.
Benefits Features
  • Precise, accurate flow control
  • High reliability
  • Bubble prevention 
  • Unique flow path and components that eliminate bubble formation and retention


Literature Downloads

Digital Mass Flow Controllers (2005) white paper
Fundamentals of Mass Flow Control (2005) white paper
Revised Conversion Factor (2002) white paper
Mass Flow Control Fundamentals and Troubleshooting data sheet
Basic Product Information and Troubleshooting for Aera® MFCs and MFMs
AE Global Services data sheet

More Information

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