The economical Integro™ RF generator combines a 13.56 MHz, 600 W RF power supply with an auto matching network in a single compact package. This saves valuable space and eases integration. Its enabling features include pulse mode and CEX operation.
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Benefits |
Features |
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Low CoO
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Easy integration
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Efficient use of valuable space
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Compact shoebox design
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Integrated auto matching network
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Pulse mode
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CEX operation mode
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Multiple interlocks and limits
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Analog user port
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Please select RF Power