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RF POWER SYSTEMS
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Integro™ RF Generators

The economical Integro™ RF generator combines a 13.56 MHz, 600 W RF power supply with an auto matching network in a single compact package. This saves valuable space and eases integration. Its enabling features include pulse mode and CEX operation.


Benefits Features
  • Low CoO
  • Easy integration
  • Efficient use of valuable space
  • Compact shoebox design
  • Integrated auto matching network
  • Pulse mode
  • CEX operation mode
  • Multiple interlocks and limits
  • Analog user port


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Literature Downloads

Climatic / Temperature Specification
AE User Port
Matching Interface Details

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