Compact, lightweight, and air-cooled, HiLight™ RF generators (13.56 MHz, 600 W) are designed to easily install in locations other than traditional 19” rack mounts. This economical product family is ideal for low-power on-board applications, suiting 13.56 MHz plasma and 1 or 2 MHz megasonic processes. HiLight generators are CE compliant and controlled via a 25-pin analog user port.
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Benefits |
Features |
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Easy installation in non-19" rack mounts
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Increased accuracy and reliability with wave or pulsing modes
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Compact, lightweight shoebox design
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Air cooling
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Wave and pulse mode
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Analog user port
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CE compliant
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