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G603 Series

Precision SEM E-Beam Power Supplies

The G603 60 kV lithography high voltage power supplies offer very high stability in E-beam applications.
 
Features
  • Low ripple and very high stability for demanding applications
  • -60 kV accelerator, 100 μA, 75 mV ripple
  • Active aAccelerator temperature compensation, 5 ppm max over 10°C to 40°C
  • +10 kV extractor, 400 μA, 35 mV (floating)
  • -1 kV suppressor, 100 μA, 25 mV ripple (floating)
  • 5 V, 3 A current controlled low ripple heater (floating)
  • Optional +25 kV focus, 30 μA, 100 mV (floating)
  • Full digital control and monitoring using fibre isolated 29-bit CAN
  • RoHS compliant to EU directive 2011/65/EU
  • CE-marked for EU LV directive 2006/95/EC



Accuracy of specifications in unlocked documents cannot be guaranteed. Please contact your AE representative to confirm specifications.