Advanced Energy
Advanced Energy
A global leader in innovative power and control technologies that drive high-growth, plasma thin-film and nontech manufacturing processes.
PRODUCTS & SERVICES  |   NEWS & EVENTS  |   REFERENCE LIBRARY  |   SALES & SUPPORT  |   FAQ  |   MEMBER SIGN IN
AE Print Image
RF POWER SYSTEMS
The Apex platform delivers superb performance in plasma-based thin film processes for semiconductor, flat panel display, or data storage manufacturing.
  |  Contact Advanced Energy |  Email this to a friend |  Print this page |  

Apex® RF Power-Delivery Systems

The versatile Apex® family of RF generators and power-delivery systems utilizes sophisticated RF-conversion technology to offer enhanced product and process reliability, in a modular design suitable for chamber mounting. The Apex platform delivers superb performance in plasma-based thin film processes for semiconductor, flat panel display, or data storage manufacturing.

Benefits Features
  • Higher power density 
  • Improved process flexibility 
  • Increased yield 
  • Lower CoO 
  • Simplified process tool integration 
  • Flexible communications 
  • Streamlined design 
  • On-board chamber mount, on-tool frame mount, rack mount, and shoebox options 
  • Wideband control loops and optional, high repetition-rate pulsing 
  • Industry-leading arc management
  • Regulatory compliant


Literature Downloads

Apex® RF Generators and Power Delivery Systems brochure     Taiwan Version
Signal Integrity for Vacuum Processing Systems (2003) white paper
Advanced Energy RF Calibration Process (2002) white paper
The Evolution of RF Power Delivery in Plasma Processing (2001) white paper
Forward and Reflected Powers. What Do They Mean? (2001) white paper
Introducing Power Supplies and Plasma Systems (2001) white paper
Arcing Problems Encountered During Sputter Deposition of Aluminum (2000) white paper
Stabilizing RF Generator and Plasma Interactions, April 2004 magazine reprint
Fabs can ride through voltage sags with power-quality targets, July 2004 magazine reprint
Power Supplies Advance Beyond Volts and Amps, June 2003 magazine reprint
March 26, 2008 - Advances in Radio Frequency Plasma Power Delivery Systems presentation
RF Power Fundamentals Course data sheet
AE Global Services brochure

 


More Information

Contact sales for additional information on this product
Find your local sales representative or authorized distributor
Register and opt in to receive RF-specific news and announcements from Advanced Energy

 

Rate this page

The information on this page was helpful. (1 - Strongly disagree, 5 - Strongly agree)
1   2   3   4   5  

How can we improve the information on this page?