The versatile Apex
® family of
RF generators and power-delivery systems utilizes sophisticated
RF-conversion technology to offer enhanced product and process reliability, in a modular design suitable for chamber mounting. The Apex platform delivers superb performance in plasma-based, thin-film processes for semiconductor, flat panel display, or data storage manufacturing.
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Benefits |
Features |
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Higher power density
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Improved process flexibility
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Increased yield
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Lower CoO
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Simplified process tool integration
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Flexible communications
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Streamlined design
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On-board chamber mount, on-tool frame mount, rack mount, and shoebox options
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Wideband control loops and optional, high repetition-rate pulsing
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Industry-leading arc management
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Regulatory compliant
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