Aera® Transformer™ Digital Mass Flow Products
With outstanding response, accuracy, repeatability, and reliability, Aera® Transformer™ digital mass flow controllers and mass flow meters will transform your process, improving yield and lowering cost of ownership.
Advanced sensor and valve technology, field-proven platform components, and high-speed, digital circuitry deliver the most precise gas flow control available. This versatile product line offers both single-gas and multi-gas, multi-range models.
| Benefits |
Features |
- Superior results
- Outstanding accuracy, repeatability, and stability
- Unsurpassed reliability
- Comprehensive communication and control
- Easy integration
- Maximum ease and versatility
- Substantial cost savings
- World-class service and support
|
- Multi-gas, multi-range selection
- Fast response
- All-metal seals and ultra-pure design
- Field programmable
- Wide range of gas selection without recalibration
- DeviceNet®, RS-485, or analog control
- Multiple alarm and diagnostic capabilities
|
Literature Downloads
Aera®Transformer™ Digital Mass Flow Products brochure 
Digital Mass Flow Controllers (2005) white paper
Fundamentals of Mass Flow Control (2005) white paper
Revised Conversion Factor (2002) white paper
Mass Flow Control Fundamentals and Troubleshooting data sheet
MFC Design for Semiconductor Processes Using Computational Fluid Dynamics (2007) magazine reprint
Beyond Pressure Transients: Using Pressure-Insensitive MFCs to Control Gases In Semiconductor Manufacturing (2006) magazine reprint
Basic Product Information and Troubleshooting for Aera® MFCs and MFMs
AE Global Services data sheet
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