Aera® PI-980® Pressure-Insensitive Mass Flow Controllers

THERMAL-BASED MASS FLOW CONTROLLERS

Photo of PI-980 Series Pressure-Insensitive MFCs

Aera^® PI-980^® Series Pressure-Insensitive MFCs

With industry-leading flow control technology, Aera^® PI-980^® Series pressure-insensitive MFCs (mass flow controllers) anticipate the increasing demands of next-generation semiconductor manufacturing processes, including etch, CVD, PVD, and diffusion. This innovative technology platform provides faster response, greater gas-flow stability, higher accuracy, and superior real-time process control when compared to previous technologies or competitive products. High flow stability delivers greater chamber-to-chamber process repeatability for improved production yields.

The PI-980 MFC's next-generation design integrates traditional thermal flow architecture with a pressure sensor, temperature sensor, and NeuralStep^®control technology. This creates a single, compact delivery package, eliminating the need for a number of costly gas panel components traditionally utilized. Multi-gas, multirange functionality dramatically reduces supporting inventory requirements, further enhancing cost efficiency. In addition to integrated diagnostics, this next-generation MFC technology has been combined with our field-proven D980 series product platform to increase system uptime and make troubleshooting quick and easy.

Benefits	Features
Improved gas delivery performance and production yields Easy integration on tool Substantial gas panel cost savings Reduced gas panel footprint Improved safety Real-time communication and control World-class service and support	Pressure-insensitive operation High accuracy and repeatability Integrated gas panel components Live gas certified, multi-gas, multi-range configuration Field programmable DeviceNet^® and analog control On-board display Integrated diagnostics All-metal seals Ultra-pure design