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THERMAL-BASED MASS FLOW CONTROLLERS
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Aera® FC-D770 Industrial Digital MFCs

The Aera® FC-D770 industrial digital mass flow controller meets the unique needs of industrial manufacturing while providing outstanding performance and value. Its design integrates the input/output options required for industrial environments with multi-gas, multi-range (MGMR) functionality and low-cost elastomer seals.
With outstanding speed, accuracy, and repeatability, Aera FC-D770 MFCs improve throughput and film quality.  Field-programmable MGMR selection also enables a high degree of ease and flexibility.
Benefits Features
  • Superior film and etch quality 
  • Enhanced throughput 
  • Maximum ease and versatility 
  • World-class service and support 
  • Outstanding speed, accuracy, stability, and repeatability 
  • Unsurpassed reliability
  • Economical elastomer seal design 
  • Multi-gas, multi-range selection 
  • Easy field programming 
  • Unlimited gas selection with recalibration
  • Quick integration
  • RS-485, RS-232, current loop, or analog control
  • Multiple alarm and diagnostic capabilities 


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