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A global leader in innovative power and control technologies that drive high-growth, plasma thin-film and nontech manufacturing processes.
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THERMAL-BASED MASS FLOW CONTROLLERS
Photo of Aera® FC-7800 series MFC
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Aera® FC-7800 Series MFCs

Field-proven in the most demanding processes, The Advanced Energy® Aera® FC-7800 series delivers precise flow control, as well as the superior resistance and ultra-high leak integrity of metal seals, to suit the majority of gas-controlled applications. Convenience-enhancing features, such as a choice of standard or Aera-exclusive electrical connectors, allow quick-and-easy replacement of existing mass flow controllers (MFCs).
Benefits Features
  • Fast response— < 2 sec flow-settling time between set points
  • Unsurpassed reliability—zero drift < 0.5% of full scale flow over one year
  • Easy integration—standard connectors and dimensions
  • Superior results—high-quality thin-film characteristics
  • Corrosion-resistant design
  • Metal seals
  • VCR®, VCO®, and Swagelok® compatible connections
  • All-metal seal design
  • Full-scale flow ranges from 10 sccm to 200 slm
  • Normally-closed or normally-open solenoid control valve
  • Leak integrity of 1x10-10 atm-cc/sec of He

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