Aera® FC-7700 Series MFCs
As the field-proven standard for a range of applications, Advanced Energy®’s Aera® FC-7700 series delivers precise flow control, while offering the economic benefits of elastomer seals. For process and equipment engineers working in the semiconductor, flat panel display, data storage, industrial vacuum, and industrial coating markets, this series provides high reliability and superior performance for non-corrosive gas applications, including CVD, PVD, etch, ion implantation, sputtering, thermal oxidation, optical glass coating, optical fiber, surface treatment, and other coating processes.
| Benefits |
Features |
- Fast response— < 2 sec flow-settling time between set points
- Unsurpassed reliability—zero drift < 0.5% of full scale flow over one year
- Easy integration—standard connectors and dimensions
- Superior results—high-quality film and etch characteristics
|
- Elastomer seals
- VCR®, VCR®, and Swagelok® compatible connections
- Full-scale flow ranges from 10 sccm to 200 slm
- Normally-closed or normally-open solenoid control valve
- Leak integrity of 1x10-6 atm-cc/sec of He
|
Literature Downloads
The information on this page was helpful. (1 - Strongly disagree, 5 - Strongly agree)
1 2 3 4 5
How can we improve the information on this page?