Aera® EPC100 and EPC100-AW Exhaust Pressure Controllers
Aera® EPC Exhaust Pressure Controllers maintain exceptional stability under the toughest fab conditions. N2 pilot valve control and patented balancing spool technology deliver a level of response, accuracy, and stability that conventional technology can’t match. The EPC100-AW model’s absolute pressure control approach even compensates for varying atmospheric pressures caused by weather or differences in altitude. Specifically designed to control chamber exhaust, the EPC product line stabilizes the process environment to enable highly uniform oxide film layers. Fast response, wide pressure control range, superior reliability, and decreased resource consumption all add up to improved yield and reduced cost of ownership.
| Benefits |
Features |
- Superior response and stability
- Highly uniform oxide layers
- Better process repeatability
- Excellent durability and reliability
- Reduced CoO
- Easy installation
- World-class service and support
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- Patented balancing spool technology
- Wide pressure control range
- Reduced power and N2 consumption
- Compact, single-package design
- Constant N2 purge for self-cleaning
- Large drain ports for wet processes
- Differential pressure monitoring function [1]
- RoHS compliance
[1] EPC100-AW and EPC100R-AW models only
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