The Aera^® AS-92 thermal vaporizer system features industry-leading reliability and flow stability—resulting in measurably improved film uniformity and increased system uptime. Unlike units that require constant refill pressures and frequent maintenance, the AS-92 vaporizer enables consistent delivery of vaporized TEOS, SiCl4, HMDS, and other precursor materials with minimal upkeep and no need to constantly monitor refill pressures.

Aera AS-92 vaporizers integrate leading thermal-chamber and MFC technologies with the exceptional design and manufacturing quality you’ve come to expect from Aera products. The result is a highly reliable, low-maintenance system that increases uptime, process repeatability, and film uniformity for semiconductor, FPD, other advanced applications that require high vapor-delivery stability.